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Title: Fabrication of mesoscopic devices using atomic force microscopic electric field induced oxidation
Authors: Lee, F. K.
Wen, G. H.
Zhang, Xixiang
Tsui, Ophelia K. C.
Keywords: Fabrication
Mesoscopic devices
Aluminum thin films
Issue Date: 2001
Citation: Nano Science and Technology : Novel Structures and Phenomena, 2nd Croucher ASI on Nano Science and Technology, HKUST, Hong Kong. Taylor and Francis, 2003. p. 193-199
Abstract: We demonstrate the fabrication of mesoscopic devices on aluminum thin film by using atomic force microscopic (AFM) electric field induced oxidation together with selective wet etching. The device structure being demonstrated is a percolating network consisting of conducting dots (70 nm in diameter) randomly distributed within an area of 1 x 1 μm2. Details on how to fabricate the network structure and the making of electrical contacts to the device will be focused upon. Good agreement between the temperature-dependent resistivity and Hall coefficient measurements of an aluminum control sample we made and those reported in the literature for bulk aluminum warrants reliability of our sample fabrication technique.
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