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Title: Ion implantation of MeV Au+ into potassium titanyl phosphate
Authors: Wang, Ke-Ming
Shi, Bo-Rong
Cue, Nelson
Lu, Fei
Meng, Ming-Qi
Hu, Hui
Shen, Ding-Yu
Liu, Yao-Gang
Fink, D.
Müller, M.
Keywords: Potassium titanyl phosphate
Range straggling
Lateral spread
Issue Date: 7-Jun-2001
Citation: Journal of physics. D, Applied physics, v. 34, 2001, p. 1569-1574
Abstract: Potassium titanyl phosphate (KTiOPO4 or KTP) was implanted with 1.0 MeV Au+ ions to a fluence of 5 × 1015 ions cm−2 at room temperature under different angles of incidence. The longitudinal and lateral range profiles, diffusion, damage, surface morphology and structure have been studied by Rutherford backscattering (RBS)/channelling, scanning electron microscopy (SEM) and x-ray diffraction. The results show that (1) the experimental mean projected range is larger than the value predicted by TRIM (transport of ions in matter) by about 15%; (2) the experimental range straggling and lateral spread deviate from the TRIM predictions by around 50 and 20%, respectively; (3) the crystal is completely amorphized in the damaged region; (4) the implanted gold in KTiOPO4 is stable against annealing at 700°C, but diffusion takes place at and above 800°C; (5) the surface morphology is different for virgin and Au+ implanted KTiOPO4.
Rights: Journal of Physics D: Applied Physics © copyright (2001) IOP Publishing Ltd. The Journal's web site is located at
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