|
HKUST Institutional Repository >
Electronic and Computer Engineering >
ECE Journal/Magazine Articles >
Please use this identifier to cite or link to this item:
http://hdl.handle.net/1783.1/1251
|
| Title: | Micromachined polycrystalline thin film temperature sensors |
| Authors: | Jiang, Linan
Wong, Man
Zohar, Yitshak |
| Keywords: | Temperature microsensors
Polycrystalline semiconductors
Thermoresistors
Integrated microsystems |
| Issue Date: | Aug-1999 |
| Citation: | Measurement science & technology, v. 10, 1999, p. 653-664 |
| Abstract: | Polycrystalline thin films based on two elemental semiconducting materials, Si and Ge, have been utilized to fabricate microthermistors. The thermistors are designed in a heavy–light–heavy doping concentration arrangement. The design, fabrication, analysis and characterization of a variety of thermistors under different doping schemes is described. Finally, the operation of the thermistors in self-heating operation is discussed. The results provide a systematic framework for the application of semiconducting microthermoresistors. |
| Rights: | Measurement Science and Technology © Copyright (1999) IOP Publishing Ltd. The Journal's web site is located at http://www.iop.org/EJ/journal/MST |
| URI: | http://hdl.handle.net/1783.1/1251 |
| Appears in Collections: | MECH Journal/Magazine Articles
ECE Journal/Magazine Articles
|
Files in This Item:
| File |
Description |
Size | Format |
|---|
| e90801.pdf | | 374Kb | Adobe PDF | View/Open |
|
Find published version via |
All items in this Repository are protected by copyright, with all rights reserved.
|
