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Title: Micromachined polycrystalline thin film temperature sensors
Authors: Jiang, Linan
Wong, Man
Zohar, Yitshak
Keywords: Temperature microsensors
Polycrystalline semiconductors
Integrated microsystems
Issue Date: Aug-1999
Citation: Measurement science & technology, v. 10, 1999, p. 653-664
Abstract: Polycrystalline thin films based on two elemental semiconducting materials, Si and Ge, have been utilized to fabricate microthermistors. The thermistors are designed in a heavy–light–heavy doping concentration arrangement. The design, fabrication, analysis and characterization of a variety of thermistors under different doping schemes is described. Finally, the operation of the thermistors in self-heating operation is discussed. The results provide a systematic framework for the application of semiconducting microthermoresistors.
Rights: Measurement Science and Technology © Copyright (1999) IOP Publishing Ltd. The Journal's web site is located at
Appears in Collections:MECH Journal/Magazine Articles
ECE Journal/Magazine Articles

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