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Title: Fabrication and characterization of a microsystem for a micro-scale heat transfer study
Authors: Jiang, Linan
Wang, Yuelin
Wong, Man
Zohar, Yitshak
Keywords: Micro-scale heat transfer
Temperature sensors
Issue Date: Dec-1999
Citation: Journal of micromechanics and microengineering, v. 9, 1999, p. 422-428
Abstract: A micro-system consisting of micro-channels with integrated temperature sensors was successfully designed and fabricated for the study of the heat-transfer properties of fluid flow in micro-domains. Surface micro-machining technology was used to construct the micro-channels with dimensions of about 40 μm x 1.4 μm x 4000 μm. Polysilicon thermistors, 4 μm x 4 μm x 0.4 μm in size were suspended across the channels and directly exposed to the fluid for local temperature measurements. The micro-channels and the micro-sensors were calibrated and the micro-system was characterized. The integrated micro-system performance was theoretically analysed to provide a framework for the interpretation of the experimental data, and the various heat-transfer mechanisms are subsequently discussed.
Rights: Journal of Micromechanics and Microengineering © Copyright (1999) IOP Publishing Ltd. The Journal's web site is located at
Appears in Collections:MECH Journal/Magazine Articles
ECE Journal/Magazine Articles

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