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Please use this identifier to cite or link to this item:
http://hdl.handle.net/1783.1/1252
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| Title: | Fabrication and characterization of a microsystem for a micro-scale heat transfer study |
| Authors: | Jiang, Linan
Wang, Yuelin
Wong, Man
Zohar, Yitshak |
| Keywords: | Micro-scale heat transfer
Temperature sensors
Microsystems |
| Issue Date: | Dec-1999 |
| Citation: | Journal of micromechanics and microengineering, v. 9, 1999, p. 422-428 |
| Abstract: | A micro-system consisting of micro-channels with integrated temperature sensors was successfully designed and fabricated for the study of the heat-transfer properties of fluid flow in micro-domains. Surface micro-machining technology was used to construct the micro-channels with dimensions of about 40 μm x 1.4 μm x 4000 μm. Polysilicon thermistors, 4 μm x 4 μm x 0.4 μm in size were suspended across the channels and directly exposed to the fluid for local temperature measurements. The micro-channels and the micro-sensors were calibrated and the micro-system was characterized. The integrated micro-system performance was theoretically analysed to provide a framework for the interpretation of the experimental data, and the various heat-transfer mechanisms are subsequently discussed. |
| Rights: | Journal of Micromechanics and Microengineering © Copyright (1999) IOP Publishing Ltd. The Journal's web site is located at http://www.iop.org/EJ/journal/JMM |
| URI: | http://hdl.handle.net/1783.1/1252 |
| Appears in Collections: | MECH Journal/Magazine Articles
ECE Journal/Magazine Articles
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| jm9420.pdf | | 358Kb | Adobe PDF | View/Open |
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