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Please use this identifier to cite or link to this item:
http://hdl.handle.net/1783.1/1262
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| Title: | Design and fabrication of an integrated microsystem for microcapillary electrophoresis |
| Authors: | Chan, Yick Chuen
Carles, Maria
Sucher, Nikolaus J.
Wong, Man
Zohar, Yitshak |
| Keywords: | Microcapillary electrophoresis
Microsystems |
| Issue Date: | Nov-2003 |
| Citation: | Journal of micromechanics and microengineering, v. 13, 2003, p. 914-921 |
| Abstract: | A capillary electrophoresis microsystem integrated with feed-through platinum electrodes was designed and fabricated for the separation of DNA fragments. A novel glass-to-silicon bonding technology, which allows anodic bonding of a glass wafer to a silicon wafer coated with a thick dielectric film by the inclusion of a thin intermediate amorphous silicon layer, was developed and employed to construct the microsystem. Despite the existence of a thick insulating material and non-uniform topography, robust devices without fluid leakage were obtained. Electrophoretic manipulation and separation of DNA fragments after capillary pre-treatment have been demonstrated and several operational considerations are discussed. The system performance suggests that silicon-based microsystems can be advantageous and practical for the fabrication of integrated microcapillary electrophoresis devices. |
| Rights: | Journal of Micromechanics and Microengineering © Copyright (2003) IOP Publishing Ltd. The Journal's web site is located at http://www.iop.org/EJ/journal/JMM |
| URI: | http://hdl.handle.net/1783.1/1262 |
| Appears in Collections: | BIOL Journal/Magazine Articles
MECH Journal/Magazine Articles
BICH Journal/Magazine Articles
BRI Journal/Magazine Articles
ECE Journal/Magazine Articles
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| jm3614.pdf | | 291Kb | Adobe PDF | View/Open |
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