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Title: Experimental results and simulation of substrate noise coupling via planar spiral inductor in RF ICs
Authors: Pun, Alan Leung Ling
Yeung, Tony
Lau, Jack
Clément, François J. R.
Su, David
Keywords: Inductors
Integrated circuit noise
Issue Date: 1997
Citation: International Electron Device Meeting 1997. IEDM Technical Digest. IEEE. 1997, p. 325-8. New York, NY, USA
Abstract: While previous studies on substrate coupling focused mostly on noise induced through drain-bulk capacitance, substrate coupling from planar spiral inductors at radio frequency via the oxide capacitance have not been reported. This paper presents experimental data and simulation results for inductor-induced noise in the substrate. Noise coupling from conventional and hollow inductors via the substrate to P+ diffusions with and without guard rings were also examined. A compact model of the inductor and substrate that can accurately match the measured inductor-induced noise is then derived. Using the inductor-substrate model, we investigated the effectiveness of various guard rings configurations to reducing substrate noise coupling, the trade-off between noise coupling and self-inductance, and the coupling of noise from the inductor of a tuned RF amplifier.
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