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Title: High-resolution multidimensional displacement monitoring system
Authors: Lee, Neville Ka-Shek
Cai, Yimin
Joneja, Ajay
Keywords: Precision setups
Displacement monitors
Quadrant detectors
Issue Date: Aug-1997
Citation: Optical engineering, v. 36, no. 8, August 1997, p. 2287-2293
Abstract: The possibility of using quadrant detectors to develop a new optical system that can monitor all six degrees of freedom of mechanica workpieces with very high resolution is investigated. A prototype system based on this approach has been designed and built. Although the system is not fully optimized, our proposed system has already demonstrated some promising results. Using a thermally compensated laser source together with a pinhole spatial filtering system, we have demonstrated that lateral resolution better than 50 nm and angular displacement resolution better than 0.25 ╬╝rad is achievable with this system.
Rights: Copyright 1997 Society of Photo-Optical Instrumentation Engineers. This paper was published in Optical engineering, v. 36, no. 8, August 1997, p. 2287-2293 and is made available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
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