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Title: Ultra-high-resolution optical monitoring system using a noise cancellation technique
Authors: Lee, Neville Ka-Shek
Cai, Yimin
Wong, Alfred S. F.
Joneja, Ajay
Keywords: Position-monitoring systems
High-resolution optical systems
Issue Date: Dec-1997
Citation: Optical engineering, v. 36, no. 12, December 1997, p. 3353-3359
Abstract: The feasibility of using bi-detectors or quad-detectors for ultra-high-resolution position-monitoring systems is explored. Factors that can affect the resolution of this kind of detection system are examined. We find that one of the major limiting factors is the shifting of the laser beam. A noise cancellation technique is developed successfully to suppress this noise. Using this noise cancellation system together with a thermally compensated laser and a pinhole spatial filter in a temperature-and vibration-controlled environment, the feasibility of ultrahigh resolution (<20 Å) for displacement monitoring is demonstrated using off-the-shelf components. © 1997 Society of Photo-Optical Instrumentation Engineers. [S0091-3286(97)00712-5]
Rights: Copyright 1997 Society of Photo-Optical Instrumentation Engineers. This paper was published in Optical engineering, v. 36, no. 12, December 1997, p. 3353-3359 and is made available as an electronic reprint with permission of the SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
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