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|Title: ||Numerical modeling of linear doping profiles for high voltage thin film SOI devices|
|Authors: ||Zhang, Shengdong|
Sin, Johnny K. O.
Lai, Tommy M. L.
Ko, Ping K.
|Keywords: ||Linear doping|
High voltage thin film SOI devices
|Issue Date: ||May-1999 |
|Citation: ||IEEE transactions on electron devices, v. 46, no. 5, May 1999, p. 1036-1041|
|Abstract: ||A numerical model for obtaining linear doping profiles in the drift region of high voltage thin film SOI devices is proposed and experimentally verified. Breakdown voltage in excess of 612 V on LDMOS transistors with 0.15 μm SOI layer, 2 μm buried oxide, and 50 μm drift region is designed and demonstrated using this model. Theoretical and experimental dependence of the breakdown voltage on the drift region length are compared. Good agreement between the simulation and experimental results are obtained. Dependence of the breakdown voltage on the doping density and doping concentration slope in the linearly doped drift region is also investigated experimentally. Results indicate that an optimum concentration slope is needed in order to optimize the breakdown voltage in the thin film SOI devices with a linear doping drift region. Finally, a 600 V CMOS compatible thin film SOI LDMOS process is also described.|
|Rights: ||© 1999 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder.|
|Appears in Collections:||ECE Journal/Magazine Articles|
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