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Title: Waveguide-coupled round-corner octagonal microresonator channel add-drop filters
Authors: Li, Chao
Poon, Andrew Wing On
Keywords: Resonantors
Microstructure devices
Add-drop filters
Issue Date: Oct-2004
Citation: Proceedings 88th Optical Society of America Annual Meeting, 10-14 October 2004, Rochester, New York, USA
Abstract: We report the first waveguide-coupled round-corner octagonal microresonator channel add-drop filters on silicon-nitride-on-silica substrates. By using photolithography and plasma etching, we fabricated a waveguide-coupled 50-micron sized octagonal microresonator with 15-micron radius round corners. Our experiment reveals TM-polarized whispering-gallery-like modes with a Q of about 3800 and a finesse of 18.
Rights: © 2004 Optical Society of America, Inc.
Appears in Collections:ECE Conference Papers

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