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Title: Fluid flows in microchannels with cavities
Authors: Yu, Zeta Tak For
Lee, Yi-Kuen
Wong, Man
Zohar, Yitshak
Keywords: Microcavity flow
Microscale flow separation
Micro vortex
Reduced Reynolds number
Issue Date: 2005
Citation: Journal of microelectromechanical systems, v. 14, no. 6, December 2005, p. 1386-1398, 2005
Abstract: Pressure-driven gas and liquid flows through microchannels with cavities have been studied using both experimental measurements and numerical computations. Several microchannels with cavities varying in shape, number and dimensions have been fabricated. One set of microdevices, integrated with sensors on a silicon wafer, is used for flow rate and pressure distribution measurements in gas flows. Another set of microdevices, fabricated using glass-to-silicon wafer bonding, is utilized for visualization of liquid flow patterns. The cavity effect on the flow in the microchannel is found to be very small, with the mass flow rate increasing slightly with increasing number of cavities. The flow pattern in the cavity depends on two control parameters; it is fully attached only if both the reduced Reynolds number and the cavity number are small. A flow regime map has been constructed, where the critical values for the transition from attached to separated flow are determined. The numerical computations reveal another control parameter, the cavity aspect ratio. The flow in the cavity is similar only if all three control parameters are the same. Finally, the vorticity distribution and related circulation in the cavity are analyzed.
Rights: © 2005 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder.
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