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Title: Modelling of piezoelectric micro positioning system using direct mapping and numerical analysis for precision grinding process control
Authors: Gao, Yong-Sheng
Tse, Shuetfung
Keywords: Micro/nano positioning
Piezoelectric hysteresis
Direct mapping
Numerical analysis
Precision grinding process control
Issue Date: 2007
Citation: International Journal of Abrasive Technology, v. 1, no. 2, 2007, p. 143 - 150
Abstract: For micro/nano positioning systems using piezoelectric actuators for precision grinding process control, sinusoidal command signals will be used and will give additional problems in comparison with the commonly used step signals due to the hysteresis effect, which require good modelling of the effect. To avoid discontinuity in obtaining the values of the piezoelectric constant, a method of direct mapping with polynomial fit has been proposed. Compared with the single polynomial approach, the model obtained was able to reduce the modelling error by 6.5%. To further reduce the modelling error, a new method using direct mapping and numerical analysis is proposed while discontinuity is avoided. Theoretical and experimental studies are conducted and comparative studies are made. Compared with the single polynomial approach, it is able to reduce the modelling error to 7.3%, which is 45.5% lower. Compared with the direct mapping with polynomial approach, the proposed method is able to reduce the modelling error by 41.7%. For a typically fast piezoelectric micro/nano positioning system, hysteresis distortion is more significant towards modelling error than dynamic distortion. The proposed new approach should be useful in precision grinding process modelling and control.
Rights: © 2007 Inderscience Enterprises Ltd. The original publication is available at
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