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Title: Integrated microgiant electrorheological fluid valves for microflow cytometry
Authors: Ling, Yun-Yang
Zhang, Yechi
Wen, Wei-Jia
Tabeling, Patrick
Lee, Yi-Kuen
Keywords: Electrorheological fluid
GER fluid
Issue Date: Aug-2008
Citation: Journal of Micro/Nanolithography, MEMS, and MOEMS, v. 8, no. 2, Apr-Jun 2009, 021103
Abstract: We present the fabrication and optimization of new integrated microgiant electrorheological (GER) valves for microflow cytometry. Compared to previous GER valves, new GER valves, consisting of an SU-8 layer, a PDMS membrane, and glass layers, were fabricated by 4-mask microelectromechanical systems technology and two new packaging methods. This design enabled good bonding and fluidic interconnection. The thickness of the PDMS membrane was designed such that the membrane deformation was large enough that the cytometry channel was well sealed. The interfacial stress between the PDMS and the PDMS/SU-8 as a function of vacuum plasma treatment time was investigated in detail. The switching behavior of the GER valves was also analyzed and characterized using fluorescence microscopy.
Rights: Copyright 2009 Society of Photo-optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
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