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Please use this identifier to cite or link to this item: http://hdl.handle.net/1783.1/6007
Title: Design and fabrication of integrated micro GER valves for micro flow cytometry
Authors: Ling, Yun-Yang
Zhang, Yechi
Wen, Wei-Jia
Tabeling, Patrick
Lee, Yi-Kuen
Keywords: Electrorheological fluid
GER fluid
Micro valves
SU-8
PDMS
Flow cytometry
Issue Date: 2008
Citation: Proceedings of the 4th Asia-Pacific Conference on Transducers and Micro-Nanotechnology (APCOT 2008), Tainan, Taiwan, 22-25 June 2008, p. 2S75
Abstract: This paper presents the fabrication and optimization of an integrated Micro GER valves for flow cytometry. Compared with previous GER valves, new GER valves, consisting of SU8, PDMS and glass layers, are fabricated by 4-mask MEMS technology and a new packaging method. This design enables good bonding and fluidic interconnection. The switching behavior of the GER valves is also characterized and analzyed.
URI: http://hdl.handle.net/1783.1/6007
Appears in Collections:PHYS Conference Papers
MECH Conference Papers

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