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Please use this identifier to cite or link to this item:
http://hdl.handle.net/1783.1/6007
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| Title: | Design and fabrication of integrated micro GER valves for micro flow cytometry |
| Authors: | Ling, Yun-Yang
Zhang, Yechi
Wen, Wei-Jia
Tabeling, Patrick
Lee, Yi-Kuen |
| Keywords: | Electrorheological fluid
GER fluid
Micro valves
SU-8
PDMS
Flow cytometry |
| Issue Date: | 2008 |
| Citation: | Proceedings of the 4th Asia-Pacific Conference on Transducers and Micro-Nanotechnology (APCOT 2008), Tainan, Taiwan, 22-25 June 2008, p. 2S75 |
| Abstract: | This paper presents the fabrication and optimization of an integrated Micro GER valves for flow cytometry. Compared with previous GER valves, new GER valves, consisting of SU8, PDMS and glass layers, are fabricated by 4-mask MEMS technology and a new packaging method. This design enables good bonding and fluidic interconnection. The switching behavior of the GER valves is also characterized and analzyed. |
| URI: | http://hdl.handle.net/1783.1/6007 |
| Appears in Collections: | PHYS Conference Papers
MECH Conference Papers
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Files in This Item:
| File |
Description |
Size | Format |
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| GER_APCOT08.pdf | | 1617Kb | Adobe PDF | View/Open |
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