|
HKUST Institutional Repository >
Electronic and Computer Engineering >
ECE Conference Papers >
Please use this identifier to cite or link to this item:
http://hdl.handle.net/1783.1/6580
|
| Title: | Fabrication and characterization of horizontally aligned carbon nanotubes for interconnect application |
| Authors: | Chai, Yang
Xiao, Zhiyong
Chan, Philip Ching-Ho |
| Keywords: | Carbon nanotubes
Polysilicon structure
Silicon oxide
Electrical property
Scaling effect
Interconnect line |
| Issue Date: | May-2009 |
| Citation: | Proceedings 59th Electronic Components and Technology Conference, 2009. ECTC 2009, San Diego, CA, USA, 26-29 May 2009, p. 1465-1469 |
| Abstract: | We discuss the use of electron-shading effect during the plasma-enhanced chemical vapor deposition to control the growth of carbon nanotubes (CNTs). We designed and fabricated the trench and island test structures. The horizontally aligned CNTs were grown from the sidewall of the polysilicon structure, parallel to the silicon oxide surface. We investigated the electrical property of the CNT number for the interconnect line application. We also studied the scaling effect of the CNT number. This approach provides a method to implement complex CNT structure by in-stiu growth, and integrate them to realize various electrical devices and interconnect lines. |
| Rights: | © 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder. |
| URI: | http://hdl.handle.net/1783.1/6580 |
| Appears in Collections: | ECE Conference Papers
|
Files in This Item:
| File |
Description |
Size | Format |
|---|
| fabri.pdf | | 1590Kb | Adobe PDF | View/Open |
|
All items in this Repository are protected by copyright, with all rights reserved.
|
