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Please use this identifier to cite or link to this item: http://hdl.handle.net/1783.1/7281
Title: Fabrication of freestanding, microperforated membranes and their applications in microfluidics
Authors: Zheng, Yizhe
Wu, Hongkai
Dai, Wen
Ryan, Declan
Keywords: Biological techniques
BioMEMS
Membranes
Microfabrication
Microfluidics
Multilayers
Optical polymers
Photolithography
Photoresists
Polymers
Issue Date: 27-Sep-2010
Citation: Biomicrofluidics, v. 4, iss. 3, 036504
Abstract: This manuscript describes a convenient method for the fabrication of freestanding, microperforated membranes in photocurable polymers using only one step of photolithography. We used photosensitive prepolymers to make the membranes and photolithography to define the micropatterns. We demonstrated the fabrication of single- and multilayer microperforated membranes in SU-8 photoresist and Norland Optical Adhesive prepolymer. These membranes can be used to pattern surfaces in various materials and to fabricate complex three-dimensional microfluidic channel structures.
Rights: © 2010 American Institute of Physics.
URI: http://hdl.handle.net/1783.1/7281
Appears in Collections:CHEM Journal/Magazine Articles

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