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Please use this identifier to cite or link to this item: http://hdl.handle.net/1783.1/7604
Title: 有源矩陣顯示基板制備方法
Authors: Kwok, Hoi-Sing (郭海成)
Wong, Man (王文)
Meng, Zhiguo (孟志國)
Zhang, Dongli (張冬利)
Sun, Jiaxin (孫家鑫)
Zhu, Xiuling (朱秀玲)
Keywords: Poly-Si TFT
Substitute
AMLCD
AMOLED
Issue Date: 29-Aug-2012
Citation: 中國專利 ZL 200610163748.9
Abstract: 有源矩陣顯示基板制備方法本發明採用簡化流程制備出適用於液晶和有機發光二極管顯示器的有源基板。主要包括採用鋁硅替代工藝,制備低電阻交叉引綫技術:採用鋁硅替代工藝,制備低源漏電阻的高性能TFT技術:多晶硅像素電極技術:將以上多種新工藝巧妙地組合,整個制備流程只需三次掩模過程。與常規的多晶硅以及非晶硅的基板制備技術相比,減少了約一倍的流程,可有效地提高產品的成品率,降低成本,具有重要的實用價值。
Rights: This patent is also available at HKUST Technology Transfer Center Patent Search at <http://patentsearch.ttc.ust.hk/ListPatentsDetail.asp?id=479>
URI: http://hdl.handle.net/1783.1/7604
Appears in Collections:ECE Patents

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