Please use this identifier to cite or link to this item: http://hdl.handle.net/1783.1/1239

Range straggling and lateral spread of MeV Au+ ions in LiB3O5 and SiN1.375H0.603

Authors Wang, KM
Shi, BR
Cue, N
Meng, MQ
Lu, F
Wang, FX
Li, W
Shen, DY
Issue Date 2000
Source Journal OF PHYSICS d-applied PHYSICS , v. 33, (15), 2000, AUG 7, p. 1764-1767
Summary Both LiB3O5 and SiN1.375H0.603 were implanted by 1.0 MeV Au+ ions to a dose of 5 x 10(15) ions cm(-2) under different angles. The range straggling and lateral spread of 1.0 MeV Au+ ions in both LiB3 O-5 and SiN1.375H0.603 were investigated by the Rutherford backscattering of 2.1 MeV He2+. The experimental mean projected range, range straggling and lateral spread are 279.7 nm, 54.0 nm and 34.6 nm for the case of LiB3O5, and 222.3 nm, 54.6 mn and 31.5 nm for the case of SiN1.375H0.603. The results show that the experimental range straggling and lateral spread are much larger than the values predicted by the 1998 version of the Transport of Inns in Matter code (TRIM98). After inelastic effects have been included in nuclear stopping regime, there is a much closer agreement with the experimental values than the original TRIM98 codes have. The maximum differences of the mean projected range, range straggling and lateral spread between experimental and calculated values are less than 3\%, 24\% and 21\%, respectively for both cases.
Subjects
ISSN 0022-3727
Rights Journal of Physics D: Applied Physics copyright © (2000) IOP Publishing Ltd. The Journal's web site is located at http://www.iop.org/EJ/Journal/JPhysD
Language English
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