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Ion implantation of MeV Au+ into potassium titanyl phosphate

Authors Wang, KM
Shi, BR
Cue, N.
Lu, F.
Meng, MQ
Hu, H.
Shen, DY
Liu, YG
Fink, D.
Muller, M.
Issue Date 2001
Source Journal OF PHYSICS d-applied PHYSICS , v. 34, (11), 2001, JUN 7, p. 1569-1574
Summary Potassium titanyl phosphate (KTiOPO4 or KTP) was implanted with 1.0 MeV Au+ ions to a fluence of 5 x 10(15) ions cm(-2) at room temperature under different angles of incidence. The longitudinal and lateral range profiles, diffusion, damage, surface morphology and structure have been studied by Rutherford backscattering (RBS)/channelling, scanning electron microscopy (SEM) and x-ray diffraction. The results show that(l) the experimental mean projected range is larger than the value predicted by TRIM (transport of ions in matter) by about 15\%; (2) the experimental range straggling and lateral spread deviate from the TRIM predictions by around 50 and 20\%, respectively; (3) the crystal is completely amorphized in the damaged region; (4) the implanted gold in KTiOPO4 is stable against annealing at 700 degreesC, but diffusion takes place at and above 800 degreesC; (5) the surface morphology is different for virgin and Au+ implanted KTiOPO4.
ISSN 0022-3727
Rights Journal of Physics D: Applied Physics © copyright (2001) IOP Publishing Ltd. The Journal's web site is located at
Language English
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