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Micromachined polycrystalline thin film temperature sensors

Authors Jiang, LN
Wong, M.
Zohar, Y.
Issue Date 1999
Source Measurement science & technology , v. 10, (8), 1999, AUG, p. 653-664
Summary Polycrystalline thin films based on two elemental semiconducting materials, Si and Ge, have been utilized to fabricate microthermistors. The thermistors are designed in a heavy-light-heavy doping concentration arrangement. The design, fabrication, analysis and characterization of a variety of thermistors under different doping schemes is described. Finally, the operation of the thermistors in self-heating operation is discussed. The results provide a systematic framework for the application of semiconducting microthermoresistors.
ISSN 0957-0233
Rights Measurement Science and Technology © Copyright (1999) IOP Publishing Ltd. The Journal's web site is located at
Language English
Format Article
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