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Fabrication and characterization of a microsystem for a micro-scale heat transfer study

Authors Jiang, LN
Wang, YL
Wong, M.
Zohar, Y.
Issue Date 1999
Source Journal of micromechanics and microengineering , v. 9, (4), 1999, DEC, p. 422-428
Summary A micro-system consisting of micro-channels with integrated temperature sensors was successfully designed and fabricated for the study of the heat-transfer properties of fluid flow in micro-domains. Surface micro-machining technology was used to construct the micro-channels with dimensions of about 40 mu m x 1.4 mu m x 4000 mu m. Polysilicon thermistors, 4 mu m x 4 mu m x 0.4 mu m in size were suspended across the channels and directly exposed to the fluid for local temperature measurements. The micro-channels and the micro-sensors were calibrated and the micro-system was characterized. The integrated micro-system performance was theoretically analysed to provide a framework for the interpretation of the experimental data, and the various heat-transfer mechanisms are subsequently discussed.
ISSN 0960-1317
Rights Journal of Micromechanics and Microengineering © Copyright (1999) IOP Publishing Ltd. The Journal's web site is located at
Language English
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