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Design and fabrication of an integrated microsystem for microcapillary electrophoresis

Authors Chan, YC HKUST affiliated (currently or previously)
Carles, M. HKUST affiliated (currently or previously)
Sucher, NJ HKUST affiliated (currently or previously)
Wong, M. View this author's profile
Zohar, Y. HKUST affiliated (currently or previously)
Issue Date 2003
Source Journal of micromechanics and microengineering , v. 13, (6), 2003, NOV, p. 914-921
Summary A capillary electrophoresis microsystem integrated with feed-through platinum electrodes was designed and fabricated for the separation of DNA fragments. A novel glass-to-silicon bonding technology, which allows anodic bonding of a glass wafer to a silicon wafer coated with a thick dielectric film by the inclusion of a thin intermediate amorphous silicon layer, was developed and employed to construct the microsystem. Despite the existence of a thick insulating material and non-uniform topography, robust devices without fluid leakage were obtained. Electrophoretic manipulation and separation of DNA fragments after capillary pre-treatment have been demonstrated and several operational considerations are discussed. The system performance suggests that silicon-based microsystems can be advantageous and practical for the fabrication of integrated microcapillary electrophoresis devices.
ISSN 0960-1317
Rights Journal of Micromechanics and Microengineering © Copyright (2003) IOP Publishing Ltd. The Journal's web site is located at
Language English
Format Article
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