Please use this identifier to cite or link to this item:

Design and fabrication of an integrated microsystem for microcapillary electrophoresis

Authors Chan, YC
Carles, M.
Sucher, NJ
Wong, M.
Zohar, Y.
Issue Date 2003
Source Journal of micromechanics and microengineering , v. 13, (6), 2003, NOV, p. 914-921
Summary A capillary electrophoresis microsystem integrated with feed-through platinum electrodes was designed and fabricated for the separation of DNA fragments. A novel glass-to-silicon bonding technology, which allows anodic bonding of a glass wafer to a silicon wafer coated with a thick dielectric film by the inclusion of a thin intermediate amorphous silicon layer, was developed and employed to construct the microsystem. Despite the existence of a thick insulating material and non-uniform topography, robust devices without fluid leakage were obtained. Electrophoretic manipulation and separation of DNA fragments after capillary pre-treatment have been demonstrated and several operational considerations are discussed. The system performance suggests that silicon-based microsystems can be advantageous and practical for the fabrication of integrated microcapillary electrophoresis devices.
ISSN 0960-1317
Rights Journal of Micromechanics and Microengineering © Copyright (2003) IOP Publishing Ltd. The Journal's web site is located at
Language English
Format Article
Access View full-text via DOI
View full-text via Web of Science
View full-text via Scopus
Files in this item:
File Description Size Format
jm3614.pdf 298721 B Adobe PDF