Please use this identifier to cite or link to this item: http://hdl.handle.net/1783.1/1384

Profilometry using an optical stylus with interferometric readout

Authors Zhang, JH
Cai, LL
Issue Date 1997
Source Measurement science & technology , v. 8, (5), 1997, MAY, p. 546-549
Summary A profilometry using an optical stylus with interferometric readout is developed for measuring the profile of a tested surface with a large step height. A modified CD optical head provides a focal spot on the tested surface. The defocusing signal from the optical head is used to drive a PZT via a feedback controller. Both the optical head and the retroreflector of the interferometer follow the profile of the tested surface through the movement of the PZT. The profile of the tested surface can be obtained with a distance interferometer.
Subjects
ISSN 0957-0233
Rights Measurement Science and Technology © copyright (1997) IOP Publishing Ltd. The Journal's web site is located at http://www.iop.org/EJ/journal/MST
Language English
Format Article
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