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Profilometry using an optical stylus with interferometric readout

Authors Zhang, JH
Cai, Lilong View this author's profile
Issue Date 1997
Source Measurement science & technology , v. 8, (5), 1997, MAY, p. 546-549
Summary A profilometry using an optical stylus with interferometric readout is developed for measuring the profile of a tested surface with a large step height. A modified CD optical head provides a focal spot on the tested surface. The defocusing signal from the optical head is used to drive a PZT via a feedback controller. Both the optical head and the retroreflector of the interferometer follow the profile of the tested surface through the movement of the PZT. The profile of the tested surface can be obtained with a distance interferometer.
ISSN 0957-0233
Rights Measurement Science and Technology © copyright (1997) IOP Publishing Ltd. The Journal's web site is located at
Language English
Format Article
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