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High-resolution multidimensional displacement monitoring system

Authors Lee, Neville Ka-shek View this author's profile
Cai, YM
Joneja, Ajay View this author's profile
Issue Date 1997
Source Optical Engineering , v. 36, (8), 1997, AUG, p. 2287-2293
Summary The possibility of using quadrant detectors to develop a new optical system that can monitor all six degrees of freedom of mechanical workpieces with very high resolution is investigated. A prototype system based on this approach has been designed and built. Although the system is not fully optimized, our proposed system has already demonstrated some promising results. Using a thermally compensated laser source together with a pinhole spatial filtering system, we have demonstrated that lateral resolution better than 50 nm and angular displacement resolution better than 0.25 mu rad is achievable with this system. (C) 1997 Society of Photo-Optical Instrumentation Engineers.
ISSN 0091-3286
Rights Copyright 1997 Society of Photo-Optical Instrumentation Engineers. This paper was published in Optical engineering, v. 36, no. 8, August 1997, p. 2287-2293 and is made available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Language English
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