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Interferometric straightness measurement system using triangular prisms

Authors Zhang, JH
Cai, Lilong View this author's profile
Issue Date 1998
Source Optical Engineering , v. 37, (6), 1998, JUN, p. 1785-1789
Summary A new interferometric system for measuring straightness is developed. In the system, triangular prisms are used to generate two converging beams. A straightness reflector is used to reflect back the converging beams along their respective paths to form a combined beam. The combined beam is received by a detector system to count the interference fringes. Being different from the traditional straightness reflector, the new straightness reflector consists of not only reflecting surfaces but also refractive surfaces. The refractive surfaces cause a change in optical path difference (OPD) when a relative lateral displacement between the triangular prisms and the straightness reflector takes place. The relationship between the OPD and the lateral displacement is derived. The expected results agree with the results in the experiments. A straightness measurement with an accuracy of 0.1 mu m is obtained over a travel range of 120 mm. (C) 1998 Society of Photo-Optical Instrumentation Engineers. [S0091-3286(98)00706-5].
ISSN 0091-3286
Rights Copyright 1998 Society of Photo-Optical Instrumentation Engineers. This paper was published in Optical engineering, v. 37, no. 6, June 1998, p. 1785-1789 and is made available as an electronic reprint with permission of the SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Language English
Format Article
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