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Fabrication technology of piezoresistive conductive PDMS for micro fingerprint sensors

Authors Lu, Miao HKUST affiliated (currently or previously)
Bermak, Amine View this author's profile
Lee, Yi-Kuen View this author's profile
Issue Date 2007-01
Source Proceedings of the 20th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2007) , Kobe, Japan, 21-25 January 2007, p. 251-254
Summary This paper reports the characterization of piezoresistivity of Conductive Polydimethylsiloxane (CPDMS) and the corresponding fabricating process for a parylene-coated, CPDMS Micro Fingerprint Sensor (MFS) with mushroom-shaped electrodes. Gauge factor of about 7.4 was demonstrated, and the piezoresistive sensitivity was about 3×10-6 Pa-¹ in the tensile test setup. The packaged MFS sensors were characterized by a pneumatic test and a nanoindentation test. We demonstrate that the fabricated device can detect pressure and force levels bellow 10 kPa and 50 µN, respectively. The use of the material and process presented in this paper offers the opportunity to realize a robust micro fingerprint sensor with low cost, low temperature process on different substrates. © 2007 IEEE.
ISSN 1084-6999
ISBN 978-1-4244-0950-1
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Language English
Format Conference paper
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