||Novel design strategy using photoresist as a temporary structural material was employed in fabricating self enclosed zeolite microtunnels reactors. The microreactor had one hundred microtunnels covered by a film of zeolite which act as catalytic and structural support. By further etching in TMAH., microchannels were produced with bigger cross sectional area. Freestanding MFI zeolite micromembranes with different Si/Al ratio were successfully fabricated on a silicon substrate. Pressure test had also indicated that the micromembrane have good mechanical strength. Two activation methods were studied to compare the efficiency in organic template removal. The zeolite micromembrane units were tested for gas permeation and separation. The micromembranes displayed an order of magnitude higher permeability (i.e., H2 and He) compared to traditional supported zeolite membranes and possessed excellent permselectivity. Separation was conducted for a gas mixture containing hydrogen, methane and carbon dioxide. Zeolite chemistry plays a role in membrane separation. Sil-1 micromembrane selectively permeated the heavier hydrocarbon and carbon dioxide resulting in a hydrogen-enriched retentate stream, while hydrogen was concentrated at the permeate outlet of the ZSM-5 micromembrane. The study demonstrated a successful integration of zeolite into microchemical system and the application of micromembrane in gas purification.