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Integrated microgiant electrorheological fluid valves for microflow cytometry

Authors Ling, Yun-Yang HKUST affiliated (currently or previously)
Zhang, Yechi HKUST affiliated (currently or previously)
Wen, Weijia View this author's profile
Tabeling, Patrick
Lee, Yi-Kuen View this author's profile
Issue Date 2009
Source Journal of Micro/Nanolithography, MEMS and MOEMS , v. 8, (2), 2009, APR-JUN, article number 021103
Summary We present the fabrication and optimization of new integrated microgiant electrorheological (GER) valves for microflow cytometry. Compared to previous GER valves, new GER valves, consisting of an SU-8 layer, a PDMS membrane, and glass layers, were fabricated by 4-mask microelectromechanical systems technology and two new packaging methods. This design enabled good bonding and fluidic interconnection. The thickness of the PDMS membrane was designed such that the membrane deformation was large enough that the cytometry channel was well sealed. The interfacial stress between the PDMS and the PDMS/SU-8 as a function of vacuum plasma treatment time was investigated in detail. The switching behavior of the GER valves was also analyzed and characterized using fluorescence microscopy. (C) 2009 Society of Photo-Optical Instrumentation Engineers. [DOI: 10.1117/1.3124191]
ISSN 1537-1646
Rights Copyright 2009 Society of Photo-optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Language English
Format Article
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