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Design and Fabrication of Integrated Micro GER Valves for Micro Flow Cytometry

Authors Ling, Yun-Yang HKUST affiliated (currently or previously)
Zhang, Yechi HKUST affiliated (currently or previously)
Wen, Weijia View this author's profile
Tabeling, Patrick
Lee, Yi-Kuen View this author's profile
Issue Date 2008
Source 4th Asia-Pacific Conference on Transducers and Micro-Nano Technology 2008 (APCOT 2008), Tainan, Taiwan , 22-25 Jun 2008, p.2S75
Summary This paper presents the fabrication and optimization of an integrated Micro GER valves for flow cytometry. Compared with previous GER valves, new GER valves, consisting of SU8, PDMS and glass layers, are fabricated by 4-mask MEMS technology and a new packaging method. This design enables good bonding and fluidic interconnection. The switching behavior of the GER valves is also characterized and analzyed.
Language English
Format Conference paper
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