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Effect of Oscillation Mode on the Free-molecule Squeeze-film Air Damping

Authors Hong, Gang HKUST affiliated (currently or previously).
Ye, Wenjing View this author's profile
Issue Date 2010
Source 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 , 2010, p. 370-374, Article number 5592237
Summary A 3D Monte Carlo (MC) simulation approach is developed and employed to study the effect of the oscillation mode on the squeeze-film air damping in the free-molecule regime. By tracking individual gas molecule's motion and its interaction with the resonator, the MC approach is by far the most accurate modeling approach for the modeling of squeeze-film damping in the free-molecule regime. The accuracy of this approach is demonstrated on several cases in which either analytical solutions or experimental measurements are available. It has been found that unlike the case when resonators oscillate in an unbounded domain, squeeze film damping is very sensitive to the mode shape, which implies that some of the existing modeling approaches based on rigid-resonator assumption may not be accurate when applied to model resonators oscillating at their deformed shape. ©2010 IEEE.
Note 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010; Xiamen; China; 20-23 January 2010; Category number10EX4290; Code 82329
ISBN 9781424465439
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Language English
Format Conference paper
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