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A simple method for fabricating multi-layer PDMS structures for 3D microfluidic chips

Authors Zhang, Mengying HKUST affiliated (currently or previously)
Wu, Jinbo HKUST affiliated (currently or previously)
Wang, Limu HKUST affiliated (currently or previously)
Xiao, Kang HKUST affiliated (currently or previously)
Wen, Weijia View this author's profile
Issue Date 2010
Source Lab on a chip , v. 10, (9), 2010, May, p. 1199-1203
Summary We report a simple methodology to fabricate PDMS multi-layer microfluidic chips. A PDMS slab was surface-treated by trichloro (1H,1H,2H,2H-perfluorooctyl) silane, and acts as a reusable transferring layer. Uniformity of the thickness of the patterned PDMS layer and the well-alignment could be achieved due to the transparency and proper flexibility of this transferring layer. Surface treatment results are confirmed by XPS and contact angle testing, while bonding forces between different layers were measured for better understanding of the transferring process. We have also designed and fabricated a few simple types of 3D PDMS chip, especially one consisting of 6 thin layers (each with thickness of 50 mu m), to demonstrate the potential utilization of this technique. 3D fluorescence images were taken by a confocal microscope to illustrate the spatial characters of essential parts. This fabrication method is confirmed to be fast, simple, repeatable, low cost and possible to be mechanized for mass production.
ISSN 1473-0197
Rights Lab on a Chip © Royal Society of Chemistry 2010. The final published article is available at
Language English
Format Article
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