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Active matrix display base plate preparing method

Method for fabrication of active-matrix display panels

Authors 郭海成 View this author's profile
王文 View this author's profile
孟志國 HKUST affiliated (currently or previously)
張冬利 HKUST affiliated (currently or previously)
孙家鑫 HKUST affiliated (currently or previously)
朱秀玲 HKUST affiliated (currently or previously)
Issue Date 2012-08-29
Source 中国专利 , ZL 2006 1 0163748.9, 2012
Summary 有源矩阵显示基板制备方法本发明采用简化流程制备出适用于液晶和有机发光二极管显示器的有源基板。主要包括采用铝硅替代工艺,制备低电阻交叉引线技术;采用铝硅替代工艺,制备低源漏电阻的高性能TFT技术;多晶硅象素电极技术;将以上多种新工艺巧妙地组合,整个制备流程只需三次掩模过程。与常规的多晶硅以及非晶硅的基板制备技术相比,减少了约一倍的流程,可有效地提高产品的成品率,降低成本,具有重要的实用价值。The present invention provides a method of an active-matrix thin film transistor array, comprising of two levels of metallic interconnections formed from one layer of metallic conductor; and thin-film transistors with source, drain and gate electrodes either fully or partially replaced with metal, and wherein the pixel electrodes are polycrystalline silicon.
Language Chinese
Format Patent
Access View details of TTC.PA.278S via HKUST Technology Transfer Center
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